Graver Technologies filter technology is specifically designed for removal of particles and agglomerates in slurries.
Chemical Mechanical Planarization (CMP) is a polishing process used to manufacture wafers for the semiconductor industry. It requires the use of a polishing tool and polishing slurry, which is delivered to the wafer surface and may contain large particles/agglomerates (> 1 μ) as a result of shipping/handling issues, drying, and interactions within the slurry distribution systems. These large particles can, in turn, increase the level of defectives (scratches) on the semiconductor wafer surface found after the CMP process has been completed. Through the use of slurry filtration, these large particles are effectively removed either in the recirculation loop or at point-of-use (POU). Loop or recirculation filtration attempts to remove large particles from the slurry as it is recirculated through a distribution loop which delivers the slurry to the tools. For these applications, 0.3 to 5-micron filters are typically used and flow rates of 1 to 3 GPM are recommended. POU filtration attempts to capture large particles at or near the point at which the slurry is dispensed onto the polishing pad. Flow rates for POU applications should not exceed .5 to 2.5 GPM. Both methods of filtration have tradeoffs concerning the volume of slurry that can be filtered before filter failure and the size of the particles that can be filtered.
How often should gas turbine filters be replaced?
This depends on the environment and filter type; however, pre-filters are changed every 3–6 months, while final filters may bechanged once in a year or two. Monitoring pressure drop is key to determiningreplacement timing.
What factors affect the operating life of a gas turbine filter?
Here are some factors:
How do I know when a filter needs to be changed?
Differential pressure across the filter is animportant aspect in this case. If it increases beyond the set threshold, thefilter may be clogged or need cleaning or replacement.
What is pressure drop and why does it matter?
Pressure drop is the resistance to airflow through afilter. A high-pressure drop reduces turbine efficiency and increases energycosts. Selecting low-resistance filters helps improve performance.
You can find the right application or product using our Tool, or through our Chat Bot.