Ultrapure Chemicals

High Performance Filter Technology for Ultrapure Chemicals

The manufacture of very small electronic components, referred to as semiconductors, includes devices such as transistors, capacitors, resistors, diodes, LED and photocells. The different types of devices can be integrated together to form integrated circuits, or VLSI (Very Large Scale Integration) devices such as microprocessors and random access memory (RAM). The high purity processes require the use of equally high purity chemicals stripping, etching, buffering and rinsing. These processes utilize solvent-based or aqueos based chemicals and chemical mixtures, all of which must filter to nanometer levels to ensure minimal defects and result in high yield. Many of these processes may require temperature in excess of 150C which will limit the processes to materials composed only of fluoropolymers such as PFA and PTFE.