Ultrapure Water

Ultrapure/DI water is used in large volumes throughout the semiconductor manufacturing process. The specifications for the DI water quality have become increasingly stringent over the years and the filter technology has evolved to meet these requirements.

Filters used to produce ultrapure water must do the following:

  • Have low levels of extractables so the filter does not introduce contamination into the water system
  • Rinse-up with minimal water flow to 18 megohm-cm resistivity and single digit ppb TOC
  • Final filters must be integrity tested/testable to assure performance at the stated micron rating
  • Perform consistently from lot to lot
  • Must retain captured contaminant even as differential pressures increase and not shed any media
  • Be produced in a clean environment or cleanroom

Ultrapure Water Filtration
APPLICATIONS
support literature

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