CITADEL All-Fluoropolymer Filter Cartridges

  • All fluoropolymer filter cartridges featuring a PTFE membrane with PFA structural components
  • Available with 0.05, 0.1 and 0.2 micron membrane
  • Manufactured, flushed and integrity tested in ISO Class 7 cleanroom
  • Pre-wet option is available
  • Performance Characteristics
    • Exhibits rapid rinse-up to 18 MΩ-cm resistivity and single digit ppb levels of TOC
    • Particle cleanliness: <10 particles / mL >0.1 µm
    • Extractable levels: < 25 ppb total in 5% HCl
    • 100% Integrity tested

Typical Applications

  • Etchers
  • Strippers
  • Hot Acids
  • Ozone
  • Bulk Delivery
  • Cleaners
  • Photoresist
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